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Vacuum Heating Furnace, Thermal Field and Furnace Liner (Complete Equipment & Components)

Vacuum heating furnaces, supporting thermal fields and furnace liners are core complete equipment and internal thermal components in the high-temperature vacuum manufacturing industry. They are precisely processed from four major materials: pure molybdenum, molybdenum-lanthanum, pure tungsten and stainless steel. We provide customized integral vacuum heating furnaces as well as supporting full-set thermal field and high-temperature resistant furnace liner components. Leveraging the ultra-high melting point of tungsten and molybdenum and the excellent corrosion resistance of stainless steel, our products adapt to full-range vacuum thermal processing at 1200–2000℃. Featuring zero carbon powder pollution, uniform temperature field and stable vacuum degree, they are widely applied in high-end industrial fields including aerospace, semiconductor crystal manufacturing, optical materials, powder metallurgy and new energy, serving as the standard complete solution for high-precision high-temperature heat treatment, sintering and crystal growth processes.

Product specification

Product Parameters

Product Information

Item	Details
Thermal Field Inner Cavity Size	Square / Round: Width 50–2000mm, Height 80–3000mm, Depth 100–4000mm, full-size non-standard customization available
Molybdenum Substrate Thickness	Heating molybdenum strip: 0.1–2mm; Heat shield molybdenum foil: 0.05–0.5mm; Load-bearing furnace plate: 0.5–20mm
Heat Insulation Layers	2–10 layers of molybdenum radiation shields, matched with temperature and vacuum degree on demand
Long-Term Working Temperature	Stainless Steel Series ≤1200℃; Mo1 Pure Molybdenum Series ≤1600℃; Mo-La Molybdenum-Lanthanum Series ≤1900℃; Pure Tungsten Series ≤2000℃
Ultimate Temperature Resistance	Under vacuum / inert atmosphere: Stainless steel up to 1300℃, Molybdenum up to 2200℃, Tungsten up to 2400℃ for short-term operation
Vacuum Adaptability	Ultimate cold vacuum ≤5×10⁻³Pa, low outgassing at high temperature, excellent residual oxygen control
Dimensional Tolerance	Compliant with ASTM B386 standard, key assembly tolerance ±0.02–0.05mm, tighter tolerance available per customer drawings
Welding Process	Electron beam vacuum welding, pore-free welds with low leakage rate, suitable for high-vacuum working conditions

Product Name	Vacuum Heating Furnace, Thermal Field, Furnace Liner
Brand	Yunjie
Model Series	Mo1 Pure Molybdenum Series / Mo-La Molybdenum-Lanthanum High-Temperature Series / Tungsten Series / Stainless Steel Series
Main Materials	Pure Molybdenum (Mo1), Molybdenum-Lanthanum (Mo-La), Pure Tungsten, High-Temperature Resistant Stainless Steel
Production Process	Precision plate forming + Electron beam vacuum welding + High-temperature stress relief annealing + Precision assembly
Minimum Substrate Purity	Molybdenum ≥99.95%; Tungsten ≥99.95%; all materials comply with corresponding ASTM standards
Material Density	Pure Molybdenum 10.2g/cm³; Mo-La 9.9–10.1g/cm³; Pure Tungsten 19.3g/cm³; Stainless Steel 7.93g/cm³
Core Advantages	Ultra-high temperature resistance, uniform and stable temperature field, high vacuum adaptability, creep resistance and non-deformation, low impurity and pollution-free, corrosion resistance and durability, full-size precision customization available
Surface Condition	Vacuum annealed clean surface, electrolytic polished bright surface, industrial precision polished surface
Structural Forms	Cylindrical, square box, customized special shapes; complete sets include vacuum heating furnace body, high-temperature metal thermal field, high-temperature resistant furnace liner, heating components, heat insulation shields, support frames, connecting fasteners and other accessories
Supporting Processing	Rolling, bending, precision machining, vacuum welding, polishing, multi-layer assembly, dimension calibration, complete furnace customization
MOQ	Complete furnace equipment and single sets of components are customizable

Classification

Vacuum Heating Furnace, Thermal Field and Furnace Liner (Complete Equipment & Components) (6)

Classification by Working Temperature & Material

Stainless Steel Vacuum Furnace / Liner / Thermal Field

Adopting high-grade high-temperature resistant stainless steel, featuring corrosion resistance, oxidation resistance, high structural rigidity and cost performance. Suitable for medium-temperature vacuum working conditions below 1200℃, widely used in general vacuum heat treatment, hardware annealing, conventional brazing and small & medium-sized industrial sintering equipment.

Mo1 Pure Molybdenum Standard Furnace Components

Molybdenum purity ≥99.95%, with stable electrical and thermal conductivity and low outgassing. Operates stably long-term below 1600℃ without impurity pollution, ideal for medium and high-temperature vacuum furnaces, conventional crystal pretreatment and cemented carbide sintering equipment.

Mo-La Molybdenum-Lanthanum High-Temperature Furnace Components

Doped with 0.1–1.8% lanthanum oxide, it possesses excellent high-temperature creep resistance, free from deformation and sagging after repeated thermal cycles. It operates stably at 1900℃ long-term, serving as the core supporting component for sapphire crystal growth, silicon carbide crystal growth and high-end new material sintering.

Pure Tungsten Ultra-High Temperature Furnace Components

With a melting point up to 3410℃, pure tungsten features ultra-high thermal stability, thermal shock resistance, deformation resistance and low vapor pressure. Its mechanical properties do not degrade under extreme high temperature of 2000℃, suitable for ultra-high temperature sintering of special materials, high-end aerospace heat treatment and precision crystal growth equipment.
Classification by Structural Form

Cylindrical Molybdenum Thermal Field

Circular radiant heating with high temperature field uniformity and low heat loss, adapted to single crystal furnaces, sapphire crystal furnaces and tubular vacuum furnaces.

Square Box Molybdenum Thermal Field

Square inner cavity with large loading capacity and convenient fixture tray placement, suitable for box-type vacuum sintering furnaces, heat treatment furnaces and brazing furnaces.

Custom Special-Shaped Thermal Field

Multi-stage stepped, eccentric and split structures, processed 1:1 according to customer equipment drawings, applicable for special welding furnaces and non-standard scientific research experimental equipment.
Classification by Functional Components

Molybdenum Heating Components: Molybdenum strip heaters, U-shaped molybdenum heating sheets, molybdenum electrode conductive rods for radiant heat supply;

Molybdenum Heat Insulation Components: Multi-layer molybdenum foil radiation heat shields, upper and lower end cover heat shields for heat reflection and energy consumption reduction;

Load-Bearing Structural Components: Molybdenum furnace beds, molybdenum support columns, molybdenum brackets for bearing workpieces and material trays;

Fastening & Assembly Components: Molybdenum bolts, molybdenum nuts, molybdenum connecting sheets, no creep loosening at high temperature;

Auxiliary Accessories: Molybdenum draft tubes, molybdenum seed crystal clamps, molybdenum shielding covers and other integrated supporting parts.

Specification Selection Guide

Temperature Range	Substrate Configuration	Core Characteristics	Applicable Furnaces & Process Scenarios
≤1200℃ Stainless Steel Series	Integrated stainless steel furnace liner, heat insulation cavity, support frame and sealing structural parts	Corrosion resistance, oxidation resistance, stable structure, cost-effective, easy cleaning and maintenance, excellent tightness	General industrial vacuum heating furnaces, hardware parts annealing furnaces, mold vacuum heat treatment furnaces, small and medium-sized vacuum brazing equipment, conventional material drying and sintering furnaces
≤1600℃ Mo1 Pure Molybdenum Series	0.03–0.3mm molybdenum foil heat shield, 0.2–1.5mm molybdenum heating strip, 1–6mm molybdenum load-bearing plate	High purity, low outgassing, uniform temperature field, good machinability, carbon-free pollution, suitable for high-vacuum clean processes	Cemented carbide sintering furnaces, electronic component vacuum coating furnaces, semiconductor accessory pretreatment furnaces, laboratory high-temperature vacuum experimental furnaces, new energy powder sintering equipment
1600–1900℃ Mo-La Molybdenum-Lanthanum Series	0.05–0.4mm Mo-La heat insulation foil, 0.3–2mm Mo-La heating strip, 2–8mm Mo-La load-bearing plate	Excellent high-temperature creep resistance, long cycle service life, no high-temperature deformation, superior heat insulation performance, suitable for long-term continuous production	Sapphire crystal growth furnaces, silicon carbide crystal growth furnaces, 5G semiconductor substrate heat treatment furnaces, optical glass purification furnaces, high-end ceramic sintering furnaces
1900–2000℃ Pure Tungsten Series	0.1–0.5mm tungsten foil heat shield, 0.5–2mm tungsten heating strip, 3–10mm tungsten load-bearing structure	Ultra-high temperature resistance, thermal shock resistance, extremely low deformation, stable high-temperature mechanical properties, ultra-low vacuum outgassing	Ultra-high temperature special ceramic sintering furnaces, aerospace & military alloy heat treatment furnaces, high-end crystal growth furnaces, precision new material R&D vacuum furnaces

Core Product Characteristics

Full-Range High-Temperature Resistance & Stable Performance

Stainless steel adapts to medium-temperature working conditions, molybdenum series withstands temperatures up to 1900℃, and tungsten series withstands ultra-high temperature up to 2000℃. All series maintain no softening, no collapse and no deformation at high temperature, completely avoiding carbon pollution and powder falling problems, fully adapting to various high-purity precision processes.

Uniform Temperature Field & Low Energy Consumption

Multi-layer molybdenum radiation shields reflect thermal radiation, reducing heat loss by more than 40%. Surrounding molybdenum strip heating controls furnace temperature difference within ±3–5℃, meeting the precise gradient temperature control requirements for crystal growth.

High Vacuum Adaptability & Low Outgassing

High-purity molybdenum substrate with vacuum annealing degassing treatment features extremely low high-temperature vapor pressure and zero volatile impurities. The residual oxygen inside the furnace is controllable, perfectly suitable for high-purity processes of semiconductors and optical materials.

High-Temperature Creep Resistance & Ultra-Long Service Life

Mo-La and pure tungsten materials deliver excellent high-temperature creep resistance, maintaining no sagging or deformation after hundreds of thermal cycles. Stainless steel structures are stable and aging-resistant, greatly reducing the maintenance and replacement cost of vacuum furnace equipment.

Excellent Electrical & Thermal Conductivity

Stable conductive and thermal conductivity ensures uniform heating of heating elements and low contact resistance of conductive joints, avoiding local overheating and burnout.

Corrosion Resistance & Non-Magnetic Property

No oxidation occurs under vacuum and inert atmosphere, and no reaction with most metals and ceramics. Non-magnetic design does not interfere with precision sensing and semiconductor detection processes.

Precise Machinability & Easy Assembly

Molybdenum materials feature excellent ductility, supporting bending, rolling, precision machining and electron beam welding. Modular split design facilitates convenient disassembly, assembly and maintenance.

Complete Production Process

Stainless steel plate cutting & forming → High-purity molybdenum/tungsten powder preparation → Isostatic pressing → Forging and hot rolling of blanks → Multi-pass precision cold rolling → Vacuum high-temperature stress relief annealing → CNC precision cutting, bending and rolling forming → Electron beam vacuum welding for furnace liner and thermal field assembly → Weld flaw detection → Electrolytic polishing / precision grinding cleaning → Multi-layer heat insulation & furnace structure assembly → Dimension calibration and tolerance re-inspection → Vacuum degassing pretreatment → Complete furnace commissioning & finished product packaging, with complete material test reports provided.

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Application Fields

Semiconductor & Crystal Industry

Complete molybdenum thermal fields for monocrystalline silicon growth furnaces, internal thermal systems for sapphire crystal furnaces, silicon carbide/aluminum nitride crystal growth furnaces, semiconductor wafer annealing furnaces and thin-film deposition vacuum furnaces, ensuring stable crystal purity and temperature gradient.

High-End Aerospace Manufacturing

Applied in superalloy vacuum heat treatment furnaces and titanium alloy vacuum brazing furnaces with zero oxidation and decarburization, meeting the strict high-temperature processing requirements of aero-engine and satellite structural parts.

Powder Metallurgy & Cemented Carbide Industry

Used for cemented carbide sintering furnaces, MIM metal injection molding degreasing & sintering furnaces and magnetic material high-temperature heat treatment furnaces. Zero carbon impurity pollution improves product density and surface quality.

Optical & New Energy Industry

Applied in optical glass purification vacuum furnaces, solar cell sputtering equipment thermal fields and hydrogen fuel cell plate sintering furnaces. The high-purity clean thermal environment improves photoelectric conversion efficiency.

Scientific Research & Special Equipment Industry

Suitable for laboratory small-scale high-temperature vacuum furnaces, new material R&D sintering furnaces, medical equipment non-magnetic heat treatment equipment and internal thermal components for vacuum tube manufacturing.

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Enterprise Supporting Services

Baoji Yunjie has long been engaged in the customized production of vacuum heating furnaces, high-temperature furnace liners and metal thermal field complete sets. We mainly provide complete equipment and components made of stainless steel, pure molybdenum, molybdenum-lanthanum and pure tungsten. Custom services cover full-series vacuum heating furnace bodies, high-temperature resistant furnace liners, multi-layer heat insulation thermal fields, heating components and support structural parts. We provide one-stop services including drawing customization, old furnace renovation, dimension surveying and mapping and solution optimization. Our products adapt to high-temperature vacuum production processes across all industries, providing stable and reliable high-temperature vacuum equipment solutions for high-end manufacturing and new material R&D.

Send Inquiry

As a professional expert providing solutions for pure tantalum (R05200, complying with ASTM B708 American Standard) and various metal accessories and custom machined parts, Baoji Yunjie focuses on precision machining-to-drawing capability, fully meeting customers' machining needs from standard parts to complex custom parts! For a full range of metal materials and products such as titanium, tantalum, niobium and zirconium, welcome to provide drawings for consultation and customization. We will accurately reproduce designs and deliver products efficiently.